Thermal Processing

APPLICATION:      Thermal Processing

DESCRIPTION:      Pawling provides unique inflatable seals made from high-grade EPDM and silicone rubber materials. Pneuma-Seal is used on the load locks and access doors in advanced vertical thermal processors for 200 mm wafers. The 150 wafer load size of these processors supports peak production by providing higher throughput at the lowest cost per wafer. The inflatable seals resist both vacuum and positive pressure, and replace traditional flat gasketing and O rings, thereby simplifying the hardware and speeding the overall processing operation.

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Engineered elastomeric technologies for sealing, clamping, and actuating

Pneuma-Seal